Modular, Small-Size Batch Reactor for the Deposition of iCVD Polymers

Poster Session: 



Maxwell T. Robinson


M. T. Robinson (1), E. Gleason (1), S. Mitra (2), M. Wang (1), J. Zhao (1), K. K. Gleason (1)

Author Affiliation: 

(1) Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States (2) Department of Physics, Astronomy, and Materials Science, Missouri State University, Springfield, Missouri 65897, United States


A small-size cube reactor (side length=6 inches) is conveniently assembled from parts available from a commercial supplier (Ideal Vacuum) and used for assembly of polymer films using initiated chemical vapor deposition (iCVD). Batch reactors are advantageous in that they significantly reduce materials usage and cost per film thickness relative to continuous flow systems that are conventionally used in iCVD. An assembled batch reactor is used to characterize the kinetics of poly(divinyl benzene) film deposition on silicon substrates with variable initiator and monomer saturation ratios.